Cassette for preventing broken of wafer

The present invention relates to a cassette for preventing a wafer from being broken, which comprises: a frictional vibration reduction unit reducing frictional vibration by dispersing stress generated on a surface from a floor surface to the whole; and a wafer loading inclination unit having a plur...

Full description

Saved in:
Bibliographic Details
Main Authors WOO, TAE GYU, HA, MIN CHUL
Format Patent
LanguageEnglish
Korean
Published 02.05.2018
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
Online AccessGet full text

Cover

More Information
Summary:The present invention relates to a cassette for preventing a wafer from being broken, which comprises: a frictional vibration reduction unit reducing frictional vibration by dispersing stress generated on a surface from a floor surface to the whole; and a wafer loading inclination unit having a plurality of slots into which wafers are inserted, and arranged to be inclined in an inclined wall of the frictional vibration reduction unit. 본 발명은 웨이퍼 파손 방지용 카세트에 관한 것으로서, 바닥면에서 표면으로 발생되는 스트레스가 전체로 분산되도록 하여 마찰진동을 감소시키는 마찰진동 감소유닛; 및 웨이퍼들이 끼워지는 다수의 슬롯을 구비하며, 상기 마찰진동 감소유닛의 경사벽체 상에 경사지게 배치되는 웨이퍼 적재용 경사유닛을 포함한다.
Bibliography:Application Number: KR20160137328