SEMICONDUCTOR PROCESS EQUIPMENT

A substrate transport system is disclosed and includes a chamber having an interior wall, a planar motor disposed on the interior wall, and a substrate carrier magnetically coupled to the planar motor. The substrate carrier comprises a base and a substrate supporting surface coupled to a support mem...

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Bibliographic Details
Main Authors PONNEKANTI HARI K, ROCHA ALVAREZ JUAN CARLOS, JANAKIRAMAN KARTHIK
Format Patent
LanguageEnglish
Korean
Published 21.03.2018
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:A substrate transport system is disclosed and includes a chamber having an interior wall, a planar motor disposed on the interior wall, and a substrate carrier magnetically coupled to the planar motor. The substrate carrier comprises a base and a substrate supporting surface coupled to a support member extending from the base in a cantilevered orientation. 기판 수송 시스템이 개시되며, 기판 수송 시스템은, 내부 벽을 갖는 챔버, 내부 벽 상에 배치되는 평면형 모터, 및 평면형 모터에 자기적으로 결합되는 기판 캐리어를 포함한다. 기판 캐리어는, 베이스, 및 캔틸레버식 배향으로 베이스로부터 연장되는 지지 부재에 결합되는 기판 지지 표면을 포함한다.
Bibliography:Application Number: KR20170115806