SEMICONDUCTOR PROCESS MANAGEMENT SYSTEM INCLUDING PROCESS MANAGEMENT APPARATUS AND DATA SERVER AND METHOD FOR MANAGING SEMICONDUCTOR PROCESS

• Main Author: SHIM, KWANG HYUN
• Format: Patent
• Language: English; Korean
• Published: 21.02.2018
• Subjects: BASIC ELECTRIC ELEMENTS; CALCULATING; CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION ORPROCESSING OF GOODS; COMPUTING; CONTROL OR REGULATING SYSTEMS IN GENERAL; CONTROLLING; COUNTING; DATA PROCESSING SYSTEMS OR METHODS, SPECIALLY ADAPTED FORADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL, SUPERVISORYOR FORECASTING PURPOSES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS; PHYSICS; REGULATING; SEMICONDUCTOR DEVICES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE,COMMERCIAL, FINANCIAL, MANAGERIAL, SUPERVISORY OR FORECASTINGPURPOSES, NOT OTHERWISE PROVIDED FOR; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS; TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINSTCLIMATE CHANGE

The present invention relates to a process management apparatus managing a semiconductor manufacturing facility. The process management apparatus according to an embodiment of the present invention comprises a control part receiving a virtual storage space from a data server and controlling a semiconductor manufacturing facility by operating a semiconductor process management program for managing a manufacturing process of the semiconductor manufacturing facility stored in the virtual storage space. Therefore, the reliability of a semiconductor facility process is established and the productivity and stability of a semiconductor apparatus can be improved. 본 발명은 반도체 제조 설비를 관리하는 공정 관리 장치로서, 본 발명의 일 실시예에 따른 공정 관리 장치는 데이터 서버로부터 가상 저장 공간을 제공 받고, 상기 가상 저장 공간에 저장된 상기 반도체 제조 설비의 제조 공정을 관리하기 위한 반도체 공정 관리 프로그램을 운영하여 상기 반도체 제조 설비를 제어하는 제어부를 포함한다.