METHODS FOR PREVENTING CORROSION OF PLASMA-EXPOSED YTTRIA COATED CONSTITUENTS

• Main Authors: LOEWENHARDT PETER, KIM YUNSANG, SWAMI GANAPATHY
• Format: Patent
• Language: English; Korean
• Published: 20.02.2018
• Subjects: BASIC ELECTRIC ELEMENTS; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SEMICONDUCTOR DEVICES; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

본 개시물의 일 실시형태에 따르면, 주변 산성 가수분해로부터 플라즈마에 노출된 산화이트륨-코팅 구성요소의 부식을 방지하는 방법이 개시되는데, 여기서, 플라즈마에 노출된 산화이트륨-코팅 구성요소는 가수분해성 산 전구체를 포함한다. 그 방법은, 반도체 공정 어셈블리로부터 플라즈마에 노출된 산화이트륨-코팅 구성요소를 제거하는 단계; 플렉시블한 습기 흡수 재료로 플라즈마에 노출된 산화이트륨-코팅 구성요소를 바인딩하는 단계; 오염된 산성 화합물을 형성하기 위해 강렬한 수성 혼화제로 가수분해성 산 전구체를 가수분해하는 단계로서, 여기서, 플렉시블한 습기 흡수 재료는 모세관 작용으로 플라즈마에 노출된 산화이트륨-코팅 구성요소에서 오염된 산성 화합물을 떼어놓는, 강력한 수성 혼화제로 가수분해성 산 전구체를 가수분해하는 단계; 플라즈마에 노출된 산화이트륨-코팅 구성요소에서 오염된 산성 화합물의 잠재분을 떼어놓기 위해 추가적인 플렉시블한 습기 흡수 재료로 플라즈마에 노출된 산화이트륨-코팅 구성요소를 탈수시키는 단계; 및 습기 차단 밀봉체로 주변 습기로부터 플라즈마에 노출된 산화이트륨-코팅 구성요소를 격리시키는 단계를 포함할 수도 있다. In accordance with one embodiment of the present disclosure, a method for preventing corrosion of a plasma-exposed yttria-coated constituent from ambient acidic hydrolysis wherein the plasma-exposed yttria-coated constituent includes a hydrolysable acid precursor is disclosed. The method may include: removing the plasma-exposed yttria-coated constituent from a semiconductor processing assembly; binding the plasma-exposed yttria-coated constituent with flexible moisture wicking material; hydrolyzing the hydrolysable acid precursor with an overwhelming aqueous admixture to form a vitiated acidic compound, wherein the flexible moisture wicking material pulls the vitiated acidic compound away from the plasma-exposed yttria-coated constituent with capillary action; dehydrating the plasma-exposed yttria-coated constituent with additional flexible moisture wicking material to pull a latent amount of the vitiated acidic compound away from the plasma-exposed yttria-coated constituent; and isolating the plasma-exposed yttria-coated constituent from ambient moisture in a moisture obstructing enclosure.