METHOD FOR PRODUCING A SUPERJUNCTION DEVICE

• Main Authors: MAUDER ANTON, VOERCKEL ANDREAS, TUTUC DANIEL, TREIBER MAXIMILIAN, SCHUSTEREDER WERNER, HIRLER FRANZ, SCHULZE HANS JOACHIM, WEBER HANS, LAVEN JOHANNES GEORG
• Format: Patent
• Language: English; Korean
• Published: 24.01.2018
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

Disclosed is a method which comprises a step of forming a plurality of semiconductor arrangements by overlapping one another. In the method, the step of forming each of the plurality of semiconductor arrangements includes the steps of: forming a semiconductor layer; forming a plurality of trenches o...