Apparutus and Method of Detecting Thickness
According to an embodiment of the present invention, an apparatus of detecting a thickness comprises: a light source emitting a femtosecond laser; an optical coupler through which a portion of the femtosecond laser is incident onto a target and the other portion of the femtosecond laser is incident...
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Main Authors | , , , , |
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Format | Patent |
Language | English Korean |
Published |
29.12.2017
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Subjects | |
Online Access | Get full text |
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Summary: | According to an embodiment of the present invention, an apparatus of detecting a thickness comprises: a light source emitting a femtosecond laser; an optical coupler through which a portion of the femtosecond laser is incident onto a target and the other portion of the femtosecond laser is incident onto a reference mirror; a detector configured to receive a reflection signal reflected on the reference mirror and a sample signal generated from the target and configured to measure a thickness of the target based on an interference signal between the reflection signal and the sample signal; and a plurality of optical fiber lines configured to connect the light source, the optical coupler, and the detector to each other.
본 발명의 실시예에 따른 두께 측정 장치는, 펨토초 레이저를 방출하는 광원, 상기 방출된 펨토초 레이저의 일부를 타겟으로 입사시키고, 다른 일부를 기준 거울로 입사시키는 광 커플러, 상기 기준 거울에서 반사된 반사 신호 및 상기 타겟에서 발생된 샘플 신호가 입사되고, 상기 반사 신호와 상기 샘플 신호간의 간섭 신호로부터 상기 타겟의 두께를 측정하는 검출기 및 상기 광원, 상기 광 커플러, 그리고 상기 검출기를 연결하는 광 파이버를 포함한다. |
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Bibliography: | Application Number: KR20160075906 |