PROBE CARD

Provided is a probe card. The probe card comprises: a plurality of conductive probes; a first substrate; a probe holder installed on the first substrate and used in fixing the conductive probes; a second substrate including a circuit connected to the conductive probes; and a power transmission line...

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Bibliographic Details
Main Authors LAI HUNG WEI, CHEN JU HUNG
Format Patent
LanguageEnglish
Korean
Published 01.11.2017
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Summary:Provided is a probe card. The probe card comprises: a plurality of conductive probes; a first substrate; a probe holder installed on the first substrate and used in fixing the conductive probes; a second substrate including a circuit connected to the conductive probes; and a power transmission line and a signal transmission line connected to the first substrate and the circuit. According to the present invention, problems generated in a power signal such as transient currents and offset are effectively suppressed when a high frequency test is performed. 프로브 카드를 제공한다. 프로브 카드는, 복수의 도전 프로브와, 제1 기판과, 상기 제1 기판에 설치됨과 함께 이들 상기 도전 프로브의 고정에 이용되는 프로브 홀더와, 이들 상기 도전 프로브에 접속되는 회로를 포함하는 제2 기판과, 상기 제1 기판 및 상기 회로에 접속되는 전원 전송선 및 신호 전송선을 구비한다.
Bibliography:Application Number: KR20170024539