발열체 및 그 제조 방법

• Main Authors: NAKAYA MASAKI, TABUCHI HIROYASU, AMANO TSUTOMU
• Format: Patent
• Language: Korean
• Published: 24.10.2017
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

본 발명의 목적은 내구성이 높은 발열체 및 그 제조 방법을 제공하는 것이다. 본 발명에 관한 발열체(1)는, 금속 탄탈륨 상을 갖는 제1 층(2)과, 제1 층(2)의 주위를 덮고, 또한 탄화탄탈륨 상을 갖는 제2 층(3)을 갖고, 제1 층(2)과 제2 층(3)의 계면부(4)에 있어서의 규소의 농도는, 계면부(4) 이외의 부분에 있어서의 규소의 농도보다 높다. An object of the disclosure is to provide a heat generation element having high durability and a method of manufacturing the same. A heat generation element 1 according to the disclosure includes a first layer 2 having a metallic tantalum phase, and a second layer 3 which covers a periphery of the first layer 2 and has a tantalum carbide phase, wherein a concentration of silicon in an interface portion 4 between the first layer 2 and the second layer 3 is higher than a concentration of silicon in a portion other than the interface portion 4.