ECHTANT AND METHOD FOR MANUFACTURING DISPLAY DEVICE USING THE SAME

• Main Authors: JANG, SANG HOON, KIM, SANG GAB, KIM, SANG TAE, KANG, KYONG MIN, LEE, JOON WOO, JIN, YOUNG JUN, LEE, SUCK JUN, LEE, YU JIN, KWON, O BYOUNG, PARK, JI YOUNG, KIM, SEON IL, CHOUNG, JONG HYUN, PARK, YOUNG CHUL, LIM, MIN KI, YU, IN HO, CHOI, SHIN IL
• Format: Patent
• Language: English; Korean
• Published: 20.09.2017
• Subjects: ADHESIVES; BASIC ELECTRIC ELEMENTS; CHEMISTRY; DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING; DYES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; FREQUENCY-CHANGING; MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FORELSEWHERE; METALLURGY; MISCELLANEOUS APPLICATIONS OF MATERIALS; MISCELLANEOUS COMPOSITIONS; NATURAL RESINS; NON-LINEAR OPTICS; OPTICAL ANALOGUE/DIGITAL CONVERTERS; OPTICAL LOGIC ELEMENTS; OPTICS; PAINTS; PHYSICS; POLISHES; SEMICONDUCTOR DEVICES; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF

An etchant according to an embodiment of the present invention comprises 0.5 to 20 wt% of persulfate, 0.01 to 2 wt% of a fluorine compound, 1 to 10 wt% of inorganic acid, 0.5 to 5 wt% of a cyclic amine compound, 0.1 to 5 wt% a chlorine compound, 0.05 to 3 wt% of copper salt, 0.1 to 10 wt% of organic acid or organic acid salt, and water. The etchant provides an excellent etching profile for a titanium/copper double film. 본 발명의 실시예에 따른 식각액은 과황산염 0.5 내지 20 중량%, 불소화합물 0.01 내지 2 중량%, 무기산 1 내지 10 중량%, 고리형 아민화합물 0.5 내지 5 중량%, 염소화합물 0.1 내지 5 중량%, 구리염 0.05 내지 3 중량%, 유기산 또는 유기산염 0.1 내지 10 중량%, 그리고 물을 포함한다.