Thermal array system

• Main Authors: SCHMIDT PHILLIP S, SWANSON CAL T, LEMKE JOHN F
• Format: Patent
• Language: English; Korean
• Published: 19.09.2017
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC HEATING; ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

시스템 및 방법이 제공된다. 상기 시스템 및 방법은 적어도 세 개의 전력 노드들을 구비하며, 이 경우에 열 엘리먼트가 전력 노드들의 각 쌍 사이에 연결된다. A thermal system includes a base member, a two-phase fluid, a tuning heater, and a chuck. The base member includes at least one fluid passageway. The two-phase fluid is disposed within the fluid passageway. A pre...