Thermal array system

시스템 및 방법이 제공된다. 상기 시스템 및 방법은 적어도 세 개의 전력 노드들을 구비하며, 이 경우에 열 엘리먼트가 전력 노드들의 각 쌍 사이에 연결된다. A thermal system includes a base member, a two-phase fluid, a tuning heater, and a chuck. The base member includes at least one fluid passageway. The two-phase fluid is disposed within the fluid passageway. A pre...

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Bibliographic Details
Main Authors SCHMIDT PHILLIP S, SWANSON CAL T, LEMKE JOHN F
Format Patent
LanguageEnglish
Korean
Published 19.09.2017
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC HEATING
ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:시스템 및 방법이 제공된다. 상기 시스템 및 방법은 적어도 세 개의 전력 노드들을 구비하며, 이 경우에 열 엘리먼트가 전력 노드들의 각 쌍 사이에 연결된다. A thermal system includes a base member, a two-phase fluid, a tuning heater, and a chuck. The base member includes at least one fluid passageway. The two-phase fluid is disposed within the fluid passageway. A pressure of the two-phase fluid is controlled such that the two-phase fluid provides at least one of heating and cooling to the base member. The tuning heater is secured to the base member. The chuck is secured to the tuning heater opposite to the base member. The tuning heater includes a plurality of zones to fine tune a heat distribution provided by the base member to the chuck.
Bibliography:Application Number: KR20177025252