SPLITTING OF A SOLID USING CONVERSION OF MATERIAL

• Main Authors: RICHTER JAN, BEYER CHRISTIAN, RIESKE RALF
• Format: Patent
• Language: English; Korean
• Published: 26.07.2017
• Subjects: CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR; PERFORMING OPERATIONS; SOLDERING OR UNSOLDERING; TRANSPORTING; WELDING; WORKING BY LASER BEAM

본 발명은 고체로부터 고체 부분를 분리하기 위해 고체에 분리영역을 생성하는 방법에 관한 것이고, 고체로부터 적어도 하나의 고체 부분를 절단하는 방법에 관한 것이다. 고체층을 분리하기 위해 고체 내에 분리영역을 생성하는 방법은 다음 단계들을 포함한다: 바람직하게는 화합물로 이루어진 가공될 고체를 제공하는 단계; 및 레이저 광원을 제공하는 단계; 상기 고체에 상기 레이저 광원으로부터의 레이저 조사를 조사하는 단계. A method for producing a detachment region in a solid-state body includes: providing a solid body that consists of a chemical compound comprising a combination of elements from the 3rd, 4th and 5th main group and subgroup 12 of the Periodic Table of the Elements; providing a laser light source; and exposing the solid body to laser beams from the laser light source. The laser beams penetrate into the solid body via a main surface of the solid body and are applied in a defined manner on a predefined portion of the solid body within the solid body to form a detachment region. The application of the laser beams successively creates multiple modifications in a crystal lattice of the solid body which, as a result of the modifications, fissures in a subcritical manner at least in a portion in each case in regions that surround the modifications.