REMOVAL LIQUID REMOVAL METHOD USING SAME AND METHOD FOR MANUFACTURING SEMICONDUCTOR SUBSTRATE PRODUCT

• Main Authors: OKAWARA TAKAHIRO, MURAYAMA SATORU, MIZUTANI ATSUSHI
• Format: Patent
• Language: English; Korean
• Published: 20.06.2017
• Subjects: ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES; APPARATUS SPECIALLY ADAPTED THEREFOR; BASIC ELECTRIC ELEMENTS; CANDLES; CHEMISTRY; CINEMATOGRAPHY; DETERGENT COMPOSITIONS; DETERGENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; ELECTROGRAPHY; FATTY ACIDS THEREFROM; HOLOGRAPHY; MATERIALS THEREFOR; METALLURGY; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS; RECOVERY OF GLYCEROL; RESIN SOAPS; SEMICONDUCTOR DEVICES; SOAP OR SOAP-MAKING; USE OF SINGLE SUBSTANCES AS DETERGENTS

레지스트 등의 박리 내지 제거 시에, 요구에 따라 알루미늄 등의 전극 재료의 손상을 억제할 수 있는 제거액, 이를 이용한 제거 방법 및 반도체 기판 제품의 제조 방법을 제공한다. 또, 컬러 필터 재료 등의 영구막이나 TSV 제작용 레지스트 및 잔사의 박리나 제거에도 적용할 수 있는 제거액, 이를 이용한 제거 방법 및 반도체 기판 제품의 제조 방법을 제공한다. 레지스트 및 에칭 잔사 중 적어도 1종을 제거하는 제거액으로서, 카복실기 또는 그 염을 갖는 환상 화합물, 제4급 암모늄 화합물, 및 유기 용매를 함유하는 제거액, 이를 이용한 제거 방법 및 반도체 기판 제품의 제조 방법. [Problem] To provide a removal liquid with which damage to electrode materials such as aluminum can be minimized, as needed, during peeling and removal of a resist or the like; a removal method using the same; and a method for manufacturing a semiconductor substrate product. Also, to provide a removal liquid that can be applied in peeling and removal of permanent films of color filter materials or the like, or of TSV resists and residues; a removal method using the same; and a method for manufacturing a semiconductor substrate product. [Solution] A removal liquid for removing at least one type of resist and etching residue, wherein the removal liquid contains a cyclic compound having a carboxyl group or salt thereof, a quaternary ammonium compound, and an organic solvent; a removal method using the same; and a method for manufacturing a semiconductor substrate product.