ELECTROSTATIC CHUCK DEVICE

• Main Authors: KOUNO HITOSHI, GOBOU FUMIHIRO
• Format: Patent
• Language: English; Korean
• Published: 16.06.2017
• Subjects: BASIC ELECTRIC ELEMENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOTDIRECTED TO A PARTICULAR RESULT; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER; DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g.ARRANGEMENTS FOR COPYING OR CONTROLLING; ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; GENERATION; MACHINE TOOLS; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OFPARTICULAR DETAILS OR COMPONENTS; METAL-WORKING NOT OTHERWISE PROVIDED FOR; PERFORMING OPERATIONS; SEMICONDUCTOR DEVICES; TRANSPORTING

판 형상 시료를 정전 흡착용 전극에 의하여 흡착함과 함께 판 형상 시료를 냉각하는 정전 척 장치로서, 세라믹 소결체를 형성 재료로 하고, 일 주면이 판 형상 시료를 재치하는 재치면인 정전 척부를 가지며, 재치면에는, 판 형상 시료를 지지하는 복수의 돌기부가 마련되고, 돌기부는, 정면에서 판 형상 시료와 접하여 판 형상 시료를 지지하며, 또한 정면의 높이 위치로부터 하방으로 단면적이 점증하고 있고, 돌기부의 정면의 하단으로부터 0.6μm 하방의 단면적이, 정면의 하단의 단면적에 대하여 110% 이하인 정전 척 장치. An electrostatic chuck device that adsorbs a plate-like specimen with an electrostatic adsorption electrode and cools the plate-like specimen, including an electrostatic chuck portion, a forming material of which is a ceramic sintered body, and that has one main surface that is a placement surface on which the plate-like specimen is placed, in which a plurality of protrusions supporting the plate-like specimen are provided on the placement surface, the protrusion has a top surface that is in contact with the plate-like specimen and supports the plate-like specimen, and has a cross-sectional area that gradually increases vertically downward from a height position of the top surface, and a cross-sectional area at a distance 0.6 μm vertically downward from a lower end of the top surface of the protrusion is 110% or less of a cross-sectional area of a lower end of the top surface.