MANUFACTURING METHOD OF ULTRA PURITY SILICA POWDER

An apparatus for producing an ultra-high purity silica powder is provided. According to the present invention, the apparatus for producing the ultra-high purity silica powder comprises: a tube furnace which is rotatable and maintains a desired temperature, which is equal to or more than a predetermi...

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Bibliographic Details
Main Authors LEE, YOUNG JUN, KIM, MYOUNG GYUN, KIM, JONG HO, PARK, JOON PYO
Format Patent
LanguageEnglish
Korean
Published 25.05.2017
Subjects
CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOIDCHEMISTRY
CHEMISTRY
COMPOUNDS THEREOF
INORGANIC CHEMISTRY
METALLURGY
NON-METALLIC ELEMENTS
PERFORMING OPERATIONS
PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
THEIR RELEVANT APPARATUS
TRANSPORTING
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Summary:An apparatus for producing an ultra-high purity silica powder is provided. According to the present invention, the apparatus for producing the ultra-high purity silica powder comprises: a tube furnace which is rotatable and maintains a desired temperature, which is equal to or more than a predetermined temperature; a gas supply device for supplying gas into the tube furnace through a supply pipe; an exhaust gas treatment device for treating exhaust gas in the tube furnace through an exhaust pipe; and a plurality of trays which are continuously introduced into the tube furnace in one direction to be recovered and contains a sample powder. 초고순도 실리카 분말 제조 장치를 제공한다. 본 발명에 따르면, 일정한 온도 이상의 설정 온도를 유지할 수 있고, 회전 가능한 튜브로, 상기 튜브로 내에 가스를 공급관을 통하여 공급하는 가스 공급 장치, 상기 튜브로 내의 배가스를 배기관을 통하여 처리하는 배가스 처리 장치, 및 상기 튜브로 내에 일 방향으로 연속적으로 계속 투입되어 회수될 수 있고, 시료 분말을 담는 복수개의 트레이를 포함한다.
Bibliography:Application Number: KR20150161381