Transfer unit for micro device

A pick-up head unit of a micro device according to an embodiment of the present invention includes: a plurality of pick-up heads picking-up micro devices; a head holder supporting the plurality of pick-up heads; and a substrate supporting the head holder, wherein the head holder is disposed between...

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Bibliographic Details
Main Authors KIM, SEON HOO, YEE, YOUNG JOO, YUH, HWAN KUK
Format Patent
LanguageEnglish
Korean
Published 08.03.2017
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:A pick-up head unit of a micro device according to an embodiment of the present invention includes: a plurality of pick-up heads picking-up micro devices; a head holder supporting the plurality of pick-up heads; and a substrate supporting the head holder, wherein the head holder is disposed between the plurality of pick-up heads and the substrate, and the shapes of the pick-up heads are deformed by movement of the plurality of pick-up heads to provide degrees of freedom to the pick-up heads. 본 발명의 일 실시예에 따른 마이크로 디바이스의 픽업 헤드유닛은 마이크로 디바이스들을 픽업(Pick-up)하는 복수의 픽업 헤드들, 상기 복수의 픽업 헤드들을 지지하는 헤드 홀더 및 상기 헤드 홀더를 지지하는 기판을 포함하고, 상기 헤드 홀더는 상기 복수의 픽업 헤드들과 상기 기판 사이에 배치되고, 상기 복수의 픽업 헤드의 움직임에 의해 그 형상이 변형되어 상기 복수의 픽업 헤드들에게 자유도를 제공하는 것을 특징으로 한다.
Bibliography:Application Number: KR20150120497