METHOD OF MAKING INORGANIC OR INORGANIC/ORGANIC HYBRID FILMS

• Main Authors: PELLERITE MARK J, WOOD THOMAS E, ZELINSKY MARIA L, INVIE JUDITH M, MAKI STEPHEN P, DUBNER ANDREW D, NACHTIGAL ALAN K, BRIGHT CLARK I, BUDD KENTON D, LYONS CHRISTOPHER S
• Format: Patent
• Language: English; Korean
• Published: 21.02.2017
• Subjects: APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; PERFORMING OPERATIONS; PROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL; SPRAYING OR ATOMISING IN GENERAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; TRANSPORTING

기판 상에 무기 또는 하이브리드 유기/무기 층을 형성하는 방법이 개시되며, 이 방법은 금속 알콕사이드를 기화시키는 단계, 금속 알콕사이드를 응축시켜 기판 상부에 층을 형성하는 단계, 및 응축된 금속 알콕사이드 층을 물과 접촉시켜 층을 경화시키는 단계를 포함한다. A method for forming an inorganic or hybrid organic/inorganic layer on a substrate, which method comprises vaporizing a metal alkoxide, condensing the metal alkoxide to form a layer atop the substrate, and contacting the condensed metal alkoxide layer with water to cure the layer is disclosed.