Semiconductor Device

According to an embodiment of the present invention, a semiconductor device comprises: a substrate including a cell region with a plurality of memory cell arrays, a peripheral circuit region, and a boundary region disposed between the cell region and the peripheral circuit region; and an air gap str...

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Bibliographic Details
Main Authors LIM, JOON SUNG, HUR, SUNG HOI, CHANG, KYU BAIK, KIM, WOO JUNG
Format Patent
LanguageEnglish
Korean
Published 16.02.2017
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:According to an embodiment of the present invention, a semiconductor device comprises: a substrate including a cell region with a plurality of memory cell arrays, a peripheral circuit region, and a boundary region disposed between the cell region and the peripheral circuit region; and an air gap structure installed on the boundary region and including a trench formed within the substrate and an air gap inside the trench. 본 발명의 일 실시예에 따른 반도체 소자는, 복수의 메모리 셀 어레이를 포함하는 셀 영역, 주변 회로 영역 및 상기 셀 영역과 상기 주변 회로 영역 사이에 배치되는 경계 영역을 포함하는 기판, 및 상기 경계 영역에 구비되며, 상기 기판 내에 형성되는 트렌치 및 상기 트렌치 내부의 에어갭을 포함하는 에어갭 구조물을 포함할 수 있다.
Bibliography:Application Number: KR20150110977