Semiconductor device

The present invention relates to a semiconductor device and a manufacturing method thereof. Provided is the semiconductor device which includes an active pattern which protrudes from a substrate, a gate electrode which crosses the active pattern, a gate spacer on the sidewalls of the gate electrode,...

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Bibliographic Details
Main Authors XU YANG, KIM, JIN BUM, MOON, KANG HUN, LEE, CHO EUN, JUNG, SU JIN
Format Patent
LanguageEnglish
Korean
Published 15.12.2016
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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