COVER FOR COMPONENT OF POLISHING APPARATUS COMPONENT OF POLISHING APPARATUS AND POLISHING APPARATUS

• Main Authors: AIZAWA HIDEO, AONO HIROSHI, SHINKAI KENJI, SONE TADAKAZU
• Format: Patent
• Language: English; Korean
• Published: 07.12.2016
• Subjects: BASIC ELECTRIC ELEMENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOTDIRECTED TO A PARTICULAR RESULT; DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g.ARRANGEMENTS FOR COPYING OR CONTROLLING; DRESSING OR CONDITIONING OF ABRADING SURFACES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS; GRINDING; MACHINE TOOLS; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OFPARTICULAR DETAILS OR COMPONENTS; MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; METAL-WORKING NOT OTHERWISE PROVIDED FOR; PERFORMING OPERATIONS; POLISHING; SEMICONDUCTOR DEVICES; TRANSPORTING

연마액이 고착되기 어려운 커버를 제공한다. 기판을 연마하기 위한 연마 장치의 구성 부품용 커버는, 구성 부품의 본체와 커버를 결합하기 위한 결합 기구로서, 커버의 내부에 설치된 결합 기구를 구비한다. 외부에 노출되는 커버의 외표면은, 오목부를 갖지 않으며, 커버의 꼭대기부를 제외하고 수평면을 갖지 않는다. There is provided a cover to which a polishing liquid is less likely to stick and solidify. The cover for a component of a polishing apparatus for polishing substrates is provided with a locking mechanism disposed inside the cover and configured to latch together a main body of the component and the cover. An external surface of the cover exposed to the outside has no recessed portion, and has no horizontal plane, except on the top portion of the cover.