ACOUSTO-OPTIC DEFLECTOR WITH MULTIPLE TRANSDUCERS FOR OPTICAL BEAM STEERING

• Main Authors: ALEKSOV ALEKSANDAR, SALAMA ISLAM A, WANG TIANSI, ZHANG CHONG, KAR ARAVINDA
• Format: Patent
• Language: English; Korean
• Published: 23.11.2016
• Subjects: CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING; FREQUENCY-CHANGING; MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR; NON-LINEAR OPTICS; OPTICAL ANALOGUE/DIGITAL CONVERTERS; OPTICAL LOGIC ELEMENTS; OPTICS; PERFORMING OPERATIONS; PHYSICS; SOLDERING OR UNSOLDERING; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF; TRANSPORTING; WELDING; WORKING BY LASER BEAM

다수의 음향 트랜스듀서를 갖는 음향 광학 편향기가 기술되는데 이는 기판 가공에서의 사용에 적합하다. 하나의 예에서 방법은 음향 광학 편향기를 통해 광학 빔을 송신하는 단계와, 음향 광학 편향기에 의해 제1 축을 따라 빔을 편향하기 위해 음향 광학 편향기의 다수의 트랜스듀서에 걸쳐 위상 지연을 갖는 음향 신호를 인가하는 단계와, 편향된 빔을 워크피스 상으로 지향시키는 단계를 포함한다. An acousto-optic deflector with multiple acoustic transducers is described that is suitable for use in substrate processing. In one example a method includes transmitting an optic beam through an acousto-optic deflector, applying an acoustic signal with a phase delay across multiple transducers of the acousto-optic deflector to deflect the beam along a first axis by the acousto-optic deflector, and directing the deflected beam onto a workpiece.