PROCESS FOR PREPARING OCTACHLOROTRISILANE AND HIGHER POLYCHLOROSILANES WITH UTILIZATION OF HEXACHLORODISILANE

• Main Authors: BRAUSCH NICOLE, RAULEDER HARTWIG, LANG JUERGEN ERWIN, MOUSSALLEM IMAD, TROCHA MARTIN
• Format: Patent
• Language: English; Korean
• Published: 07.11.2016
• Subjects: CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOIDCHEMISTRY; CHEMISTRY; COMPOUNDS THEREOF; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; INORGANIC CHEMISTRY; METALLURGY; NON-METALLIC ELEMENTS; PERFORMING OPERATIONS; PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL; PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS; THEIR RELEVANT APPARATUS; TRANSPORTING

The present invention relates to an apparatus and a method for manufacturing octachlorotrisilane and higher polychlorosilane, such as DCTS and DCPS, from a monomer-type chlorosilane with a controlled method, by exposing chlorosilane to non-thermal plasma and recirculating the chlorosilane which is not converted to the octachlorosilane to the inside of the plasma. Provided is the method for manufacturing octachlorotrisilane and higher polychlorosilane, which can reduce the complexity. 본 발명은 클로로실란을 비열적 플라즈마에 노출시키고 옥타클로로트리실란으로 전환되지 않은 클로로실란을 플라즈마 내로 재순환시킴으로써, 단량체성 클로로실란으로부터 옥타클로로트리실란 및 보다 고급의 폴리클로로실란, 예컨대 DCTS 및 DCPS를 제어된 방식으로 제조하기 위한 방법 및 장치에 관한 것이다.