Manufacturing Method oF High Purity Cylindrical Mold Substrate For Nano Pattern Formation

• Main Authors: SHIN, MYUNG DONG, KIM, SUNG HOON, SEO, SANG HYUN, CHAE, JOO HYUN
• Format: Patent
• Language: English; Korean
• Published: 24.10.2016
• Subjects: AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS; GRINDING; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; METALLURGY; PERFORMING OPERATIONS; POLISHING; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDEDFOR; SHAPING OR JOINING OF PLASTICS; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; TRANSPORTING; WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL

The present invention relates to a manufacturing method of a high-purity cylindrical mold substrate for forming a nanopattern, more specifically comprising the following steps of: lapping and processing an outer circumferential surface of a cylindrical alloy mold substrate; polishing and processing the outer circumferential surface of the lapped and processed cylindrical alloy mold substrate; and depositing high-purity aluminum on the outer circumferential surface of the polished and processed cylindrical alloy mold substrate. Provided in the present invention is the method for manufacturing the high-purity cylindrical mold substrate used in the manufacture of a nanomaster for a nanoimprinting process in an effective manner. 본 발명은 나노 패턴 형성용 고 순도 원통형 금형 기재의 제조방법에 관한 것으로, 보다 구체적으로 원통형 합금 금형 기재의 외주면 표면을 랩핑(lapping) 가공하는 단계; 상기 랩핑 가공된 원통형 합금 금형 기재의 외주면 표면을 폴리싱(polishing) 가공하는 단계; 및 상기 폴리싱 가공된 원통형 합금 금형 기재의 외주면 표면에 스퍼터링 공정을 이용하여 고 순도의 알루미늄을 증착하는 단계;를 포함한다.