SEMICONDUCTOR APPARATUS AND TEST METHOD THEREOF

A semiconductor apparatus of the present technology comprises: a plurality of through vias; and a self-repair unit for charging the through vias up to a preset threshold time for a normal through via to reach a reference level, and repairing a through via determined as fail by determining pass/fail...

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Bibliographic Details
Main Author SHIM, SEOK BO
Format Patent
LanguageEnglish
Korean
Published 20.10.2016
Subjects
MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
PHYSICS
TESTING
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