SEMICONDUCTOR APPARATUS AND TEST METHOD THEREOF

A semiconductor apparatus of the present technology comprises: a plurality of through vias; and a self-repair unit for charging the through vias up to a preset threshold time for a normal through via to reach a reference level, and repairing a through via determined as fail by determining pass/fail...

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Bibliographic Details
Main Author SHIM, SEOK BO
Format Patent
LanguageEnglish
Korean
Published 20.10.2016
Subjects
MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
PHYSICS
TESTING
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Summary:A semiconductor apparatus of the present technology comprises: a plurality of through vias; and a self-repair unit for charging the through vias up to a preset threshold time for a normal through via to reach a reference level, and repairing a through via determined as fail by determining pass/fail according to each voltage level of the charged through vias. 본 기술은 복수의 관통 비아; 및 정상 관통 비아가 기준 레벨에 도달할 수 있도록 기 설정된 임계 시간만큼 상기 복수의 관통 비아를 충전하고, 충전된 상기 복수의 관통 비아 각각의 전압 레벨에 따라 패스/페일을 판정하여 페일 판정된 관통 비아를 리페어하도록 구성된 셀프 리페어부를 포함할 수 있다.
Bibliography:Application Number: KR20150051057