ALUMINUM COMPOUND AND FORMING METHOD OF ALUMINUM-CONTAINING FILM USING THE SAME

The present invention relates to an aluminum compound represented by R_3AlL, an aluminum-containing film composition comprising the same, and a method to form an aluminum-containing film using the same. Each R independently represents a linear or a branch-type C_(3-8) alkyl group, and L is selected...

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Bibliographic Details
Main Authors HAN, WON SEOK, LEE, HONG JOO, KOH, WON YONG
Format Patent
LanguageEnglish
Korean
Published 25.08.2016
Subjects
ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAININGELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN,SULFUR, SELENIUM OR TELLURIUM
BASIC ELECTRIC ELEMENTS
CHEMISTRY
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
METALLURGY
ORGANIC CHEMISTRY
SEMICONDUCTOR DEVICES
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Summary:The present invention relates to an aluminum compound represented by R_3AlL, an aluminum-containing film composition comprising the same, and a method to form an aluminum-containing film using the same. Each R independently represents a linear or a branch-type C_(3-8) alkyl group, and L is selected from the group consisting of linear or cyclic ether, and linear or cyclic amine. The aluminum compound has increased thermal stability, and is easy to be stored and transported. RAlL(R은 각각 독립적으로, 선형 또는 분지형의 C알킬기를 포함하고; L은 선형 또는 고리형의 에테르 및 선형 또는 고리형의 아민으로 이루어진 군에서 선택되는 것을 포함함)로 표시되는 알루미늄 화합물, 이를 포함하는 알루미늄-함유 막 조성물 및 이를 이용한 알루미늄-함유 막의 형성 방법에 관한 것으로서, 열안정성이 증가하여 보관 및 운송이 용이한 알루미늄 화합물 및 알루미늄-함유 막 형성용 조성물을 제공한다.
Bibliography:Application Number: KR20160018522