THE CONVERGENCE PLASMA CLEANING APPRATUS

• Main Authors: CHOI, JONG YONG, PARK, JA IL, CHOI, KYU HO, CHEON, JONG HYEOK, HONG, JIN, PYUN, KANG O
• Format: Patent
• Language: English; Korean
• Published: 23.08.2016
• Subjects: BASIC ELECTRIC ELEMENTS; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SEMICONDUCTOR DEVICES; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

Disclosed is a high voltage convergence exhaust plasma cleaning apparatus. According to the present invention, the high voltage convergence exhaust plasma cleaning apparatus comprises: a reactor formed between a semiconductor reactor (chamber) and a vacuum pump, and forming a transformer coupled plasma (TCP); a ferrite core assembly mounted outside the reactor; a power line to apply power to the ferrite core assembly around which the power line is wound, and a power generator; and a high power ignition apparatus formed outside the reactor and mounted not to be overlapped with a position of the ferrite core assembly. Therefore, the high voltage convergence exhaust plasma cleaning apparatus can initially discharge power without an argon gas and a nitrogen gas and can specially maintain the plasma in the inflow of the large amount gas. 고전압 융합 배기부 플라즈마 정화장치가 개시된다. 본 발명에 따른 고전압 융합 배기부 플라즈마 정화장치는, 반도체 반응로(챔버)와 진공펌프의 중간에 형성되며 트랜스포머 결합 플라즈마(Transformer Coupled Plasma, TCP)를 형성하는 리액터; 리액터의 외부에 장착되는 페라이트 코어 어셈블리; 페라이트 코어 어셈블리에는 감겨져 전력을 인가하는 전력선 및 파워제네레이터; 리액터의 외부에 형성되며 페라이트 코어 어셈블리의 위치와 겹치지 않도록 장착되는 고전압 점화장치;를 포함한다. 이에 따르면, 아르곤, 질소 가스 없이도 초기 방전이 가능하며, 특히 대량 가스 유입시에도 플라즈마를 유지할 수 있는 큰 장점이 있다.