WAFER TRANSFER POD FOR REDUCING WAFER PARTICULATE CONTAMINATION
The present invention relates to a wafer transfer pod including a main body which stores or transfers semiconductor wafers during a semiconductor manufacturing process. The main body includes: an upper panel; a bottom panel; a rear panel; a front panel which provides the inlet and outlet of semicond...
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Main Authors | , , , , |
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Format | Patent |
Language | English Korean |
Published |
14.07.2016
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Subjects | |
Online Access | Get full text |
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Summary: | The present invention relates to a wafer transfer pod including a main body which stores or transfers semiconductor wafers during a semiconductor manufacturing process. The main body includes: an upper panel; a bottom panel; a rear panel; a front panel which provides the inlet and outlet of semiconductor wafers for the inside and outside of the wafer transfer pod; and two lateral panels which accommodate the semiconductor wafers. The two lateral panels have partitions individually sealed in the main body, two partitions of the sealed partitions prevent the contamination of wafers by sealing the wafers inside, and the sealed partitions individually determine the position of the wafers.
반도체 제조 공정 중에 반도체 웨이퍼를 저장 또는 운반하는 웨이퍼 운반 포드로서, 본체를 포함하고, 상기 본체는, 상부 패널, 바닥 패널, 후방 패널, 웨이퍼 운반 포드 내외로 반도체 웨이퍼의 입구 및 출구를 제공하는 전방 패널, 및 상기 반도체 웨이퍼를 수용하는 2개의 측면 패널을 포함한다. 2개의 측면 패널은 본체의 내측에 복수 개의 개별 밀봉된 격벽을 가지며, 밀봉된 격벽들 중 임의의 2개의 격벽은 웨이퍼를 내부에 밀봉하여 웨이퍼의 오염을 방지하고, 복수 개의 밀봉된 격벽은 각각 웨이퍼를 위치 결정한다. |
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Bibliography: | Application Number: KR20160084364 |