BRUSH COMPOSITION AND METHOD OF PRODUCING STRUCTURE CONTAINING PHASE-SEPARATED STRUCTURE

• Main Authors: YAMANO HITOSHI, KUROSAWA TSUYOSHI, MIYAGI KEN, YAHAGI MASAHITO, MATSUMIYA TASUKU
• Format: Patent
• Language: English; Korean
• Published: 15.06.2016
• Subjects: BASIC ELECTRIC ELEMENTS; CHEMISTRY; COMPOSITIONS BASED THEREON; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVINGCARBON-TO-CARBON UNSATURATED BONDS; METALLURGY; ORGANIC MACROMOLECULAR COMPOUNDS; SEMICONDUCTOR DEVICES; THEIR PREPARATION OR CHEMICAL WORKING-UP

The present invention relates to a grounder composition used to phase separate a layer comprising a block copolymer on a substrate. More particularly, the grounder composition comprises a resin component (N) including a hydrophobic structural unit (Nx) represented by chemical formula (Nx-1), and a hydrophilic structural unit (Ny) represented by chemical formula (Ny-1). The hydrophilic structural unit (Ny) constitutes 5 mol% or less of the resin component (N). 기판 상에, 블록 코폴리머를 포함하는 층을 상분리시키기 위해서 사용되는 하지제 조성물로서, 수지 성분 (N) 을 함유하고, 그 수지 성분 (N) 이, 소수성의 구성 단위 (Nx) 와, 친수성의 구성 단위 (Ny) 를 함유하고, 상기 수지 성분 (N) 중의, 상기 구성 단위 (Ny) 의 함유량이, 5 몰％ 이하인 것을 특징으로 하는 하지제 조성물.