MAGNETICFIELD SENSOR AND MANUFACTURING METHOD THEREOF, AND SUBSTRATE PROCESSING APPARATUS EMPLOYING THE SAME

• Main Authors: EMMA DANIELYAN, PARK, SEUNG JIN, HARUTYUN MELIKYAN, WON, JUNG MIN, HA, CHANG SEUNG
• Format: Patent
• Language: English; Korean
• Published: 13.05.2016
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; MEASURING; MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES; PHYSICS; PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS; SEMICONDUCTOR DEVICES; TESTING

The present invention relates to a magnetic field sensor, a manufacturing method thereof, and a substrate processing device. The magnetic field sensor can comprise: a first layer which is formed with a conductor; a second layer which is formed of a dielectric substance on the first layer; a third la...