MAGNETICFIELD SENSOR AND MANUFACTURING METHOD THEREOF, AND SUBSTRATE PROCESSING APPARATUS EMPLOYING THE SAME

• Main Authors: EMMA DANIELYAN, PARK, SEUNG JIN, HARUTYUN MELIKYAN, WON, JUNG MIN, HA, CHANG SEUNG
• Format: Patent
• Language: English; Korean
• Published: 13.05.2016
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; MEASURING; MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES; PHYSICS; PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS; SEMICONDUCTOR DEVICES; TESTING

The present invention relates to a magnetic field sensor, a manufacturing method thereof, and a substrate processing device. The magnetic field sensor can comprise: a first layer which is formed with a conductor; a second layer which is formed of a dielectric substance on the first layer; a third layer which is formed on the second layer, and includes a conductive line and the dielectric substance surrounding the conductive line; a fourth layer which is formed of the dielectric substance on the third layer; and a fifth layer which is formed with the conductor on the fourth layer. The conductive line forms a loop on a plane on which the conductive line is formed. A part of the loop is cut. Therefore, a lot of magnetic field sensors having the uniform performance can be manufactured. 본 발명은 자기장 센서 및 그 제조 방법, 그리고 그를 이용하는 기판 처리 장치에 관한 것이다. 본 발명의 일 실시예에 따른 자기장 센서는, 전도체로 형성된 제 1 층; 상기 제 1 층 위에 유전체로 형성된 제 2 층; 상기 제 2 층 위에 형성되며, 전도성 라인 및 상기 전도성 라인을 둘러싸는 유전체를 포함하고, 상기 전도성 라인은 상기 전도성 라인이 위치하는 평면에서 루프를 형성하되, 상기 루프는 일 부분에서 절단된, 제 3 층; 상기 제 3 층 위에 유전체로 형성된 제 4 층; 및 상기 제 4 층 위에 전도체로 형성된 제 5 층;을 포함할 수 있다.