MANUFACTURING METHOD OF NANOWIRE ARRAY PIEZOELECTRIC ELEMENT

Disclosed is a manufacturing method of a nanowire array piezoelectric element, which prevents energy loss while coming in contact with an electrode. The manufacturing method of a nanowire array piezoelectric element includes: a polymer substrate generating step of generating a polymer substrate havi...

Full description

Saved in:
Bibliographic Details
Main Authors LEE, SHIN JAE, CHOI, DONG HOON, SEO, MIN HO, YEON, JEONG HO, YOON, JUN BO, CHOI, SO YOUNG
Format Patent
LanguageEnglish
Korean
Published 02.05.2016
Subjects
ELECTRICITY
Online AccessGet full text

Cover

More Information
Summary:Disclosed is a manufacturing method of a nanowire array piezoelectric element, which prevents energy loss while coming in contact with an electrode. The manufacturing method of a nanowire array piezoelectric element includes: a polymer substrate generating step of generating a polymer substrate having a convex part corresponding to a concave part of a nanowire array template by injecting ultraviolet curing resin on the nanowire array template having the concave part; a separation step of separating the polymer substrate from the nanowire array template; a deposition step of depositing a piezoelectric substance on the polymer substrate; and a patterning step of generating an electrode on the piezoelectric substance and patterning the electrode. 나노와이어 압전소자의 제조방법에 있어서, 오목부가 형성된 나노와이어 어레이 템플릿 상에 자외선 경화수지를 주입하여 상기 오목부에 대응하는 볼록부를 갖는 폴리머 기판을 생성하는 폴리머 기판 생성단계; 상기 폴리머 기판을 상기 나노와이어 어레이 템플릿으로부터 분리하는 분리단계; 상기 폴리머 기판 상에 압전 물질을 증착하는 증착단계; 및 상기 압전 물질 상에 전극을 생성하고, 상기 전극을 패터닝하는 패터닝단계; 를 포함한다.
Bibliography:Application Number: KR20140143544