RESISTOR AND SEMICONDUCTOR DEVICE INCLUDING THE SAME

• Main Authors: KIM, DONG WON, KANG, MYUNG GIL, KIM, IL RYONG, CHO, KEUN HWI, FUKAI TOSHINORI, OH, CHANG WOO
• Format: Patent
• Language: English; Korean
• Published: 01.04.2016
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

According to an embodiment of the present invention, a resistor comprises: a substrate; a device separation film arranged on the substrate and configured to define active regions arranged in one direction; a resistance film including resistance patterns which vertically protrude from the substrate on the active regions and are connected to each other in the one direction; and contact electrodes arranged on the resistance film. Therefore, the resistor has a predetermined resistance value in accordance with the length of the resistance film. 본 발명의 실시예에 따른 저항 소자는 기판, 상기 기판에 배치되어 일 방향으로 배열된 활성 영역들을 정의하는 소자 분리막, 상기 활성 영역들 상의 상기 기판으로부터 수직으로 돌출된 저항 패턴들이 상기 일 방향으로 연결되어 형성된 저항막, 및 상기 저항막 상에 배치되는 콘택 전극들을 포함한다.