ILLUMINATION APPARATUS, OPTICAL INSPECTION APPARATUS, AND OPTICAL MICROSCOPE

Provided is a lighting apparatus which enables to change a ray angle distribution of an illumination light while suppressing a loss of light quantity. The lighting apparatus comprises: a light source to emit light; multiple reflection element (4) which receives light (Lc) from a light incident surfa...

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Bibliographic Details
Main Authors KIMURA NOBUYUKI, TOGASHI MITSUHIRO, NUMATA MITSUNORI, TAKADA MASAKI
Format Patent
LanguageEnglish
Korean
Published 24.02.2016
Subjects
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PHYSICS
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