SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME

• Main Authors: YOO, DONG CHUL, KIM, CHAE HO, AHN, JAE YOUNG, LEE, WOONG
• Format: Patent
• Language: English; Korean
• Published: 23.02.2016
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

A three-dimensional semiconductor device includes a substrate which includes a cell array region, a word line contact region, and a peripheral circuit region; gate electrodes which are extended from the cell array region to the word line contact region, and are stacked on the substrate; a channel ho...