SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME
A three-dimensional semiconductor device includes a substrate which includes a cell array region, a word line contact region, and a peripheral circuit region; gate electrodes which are extended from the cell array region to the word line contact region, and are stacked on the substrate; a channel ho...
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Main Authors | , , , |
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Format | Patent |
Language | English Korean |
Published |
23.02.2016
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Subjects | |
Online Access | Get full text |
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