SEMICONDUCTOR DEVICE

• Main Authors: USAMI TATSUYA, KODAMA SATOSHI, ITOU TAKAMASA, OGURA TAKASHI, UENO SHUUICHIROU, ITOU SATOSHI
• Format: Patent
• Language: English; Korean
• Published: 17.02.2016
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

The preset invention is to reduce the resistance of a conductor formed in a wiring layer. An insulating layer (ETS1) is formed on a substrate (SUB), and includes SiO_(1-x)N_x, wherein x > 0.5 is satisfied in an analysis result of XRD. A wiring (INC1) is formed on the insulating layer (ETS1), and...