PROCESSING APPARATUS FOR GLASS SUBSTRATE CONSTITUTED TO PROCESS PLURAL SUBSTRATES AT ONCE

• Main Authors: HAM, YOUNG JOON, KIM, JEONG EUI, KIM, SEUNG YONG, YEO, WON JAE
• Format: Patent
• Language: English; Korean
• Published: 04.02.2016
• Subjects: CHEMISTRY; CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION ORPROCESSING OF GOODS; CONVEYING; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GLASS; HANDLING THIN OR FILAMENTARY MATERIAL; MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES; METALLURGY; MINERAL OR SLAG WOOL; PACKING; PERFORMING OPERATIONS; PNEUMATIC TUBE CONVEYORS; SHOP CONVEYOR SYSTEMS; STORING; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS; TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINSTCLIMATE CHANGE; TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING; TRANSPORTING

The present invention relates to a glass substrate process treating apparatus and, more particularly, to a glass substrate process treating apparatus which can dramatically improves treatment yield and enables the entire apparatus to be constructed compactly by simultaneously performing a transfer process and a process treatment process on a plurality of glass substrates. A glass substrate process treating apparatus constructed to simultaneously treat plural substrates according to the present invention includes: a first housing member in which a glass substrate is housed; a second housing member installed on the bottom of the first housing member; a third housing member which is disposed at the side of the first housing member; a fourth housing member which is installed on the bottom of the third housing member; first to fourth opening/closing members for opening and closing front surfaces of the first housing member to the fourth housing member; heater members respectively installed in the housing members; filter members respectively installed in the housing members; and voltage increasing members respectively installed in the housing members, wherein the first to fourth housing members are formed in a hexahedral shape, wherein the first and third opening/closing members are slid in an upward direction with respect to the first and third housing members to open the first and third housing members respectively, and the first and third opening/closing members are slid in a downward direction with respect to the first and third housing members to close the first and third housing members, and wherein the second and fourth opening/closing members are slid in a downward direction with respect to the second and fourth housing members to open the second and fourth housing members respectively, and the second and fourth opening/closing members are slid in an upward direction with respect to the second and fourth housing members to close the second and fourth housing members. 본 발명에 따른 복수의 기판을 동시에 처리하도록 구성되는 유리 기판의 공정 처리 장치는 내부에 유리기판을 수용하기 위한 제 1 하우징부재와, 상기 제 1 하우징부재의 하부에 설치되는 제 2 하우징부재와, 상기 제 1 하우징부재의 측부에 배치되는 제 3 하우징부재와, 상기 제 3 하우징부재의 하부에 설치되는 제 4 하우징부재와, 상기 제 1 하우징부재 내지 제 4 하우징부재의 전면을 개폐하기 위한 제 1 내지 제 4 개폐부재와, 상기 하우징부재들 내부에 각각 설치되는 히터부재와, 상기 하우징부재들 내부에 각각 설치되는 필터부재와, 상기 하우징부재들 내부에 각각 설치되는 승압부재를 포함하며, 상기 제 1 내지 제 4 하우징부재는 육면체 형상으로 형성되고, 상기 제 1 개폐부재와 제 3 개폐부재는 상기 제 1 하우징부재와 제 3 하우징부재에 대해 상방으로 슬라이딩됨으로써 상기 제 1 하우징부재와 제 3 하우징부재를 각각 개방하고, 하방으로 슬라이딩됨으로써 상기 제 1 하우징부재와 제 3 하우징부재를 폐쇄하며, 상기 제 2 개폐부재와 제 4 개폐부재는 상기 제 2 하우징부재와 제 4 하우징부재에 대해 하방으로 슬라이딩됨으로써 상기 제 2 하우징부재와 제 4 하우징부재를 개방하고, 상방으로 슬라이딩됨으로써 상기 제 2 하우징부재와 제 4 하우징부재를 폐쇄하도록 구성되는 것을 특징으로 한다.