OPTICS APPARATUS FOR INSPECTING SURFACE OF PANEL AND METHOD FOR INSPECTING SURFACE
The present invention relates to an optics device for inspecting a surface, comprising: a light source unit which emits inspection light to inspect a panel; an aspheric mirror which reflects the incident inspection light emitted from the light source unit via the panel to the panel side; an imaging...
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Main Authors | , , , , |
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Format | Patent |
Language | English Korean |
Published |
27.01.2016
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Subjects | |
Online Access | Get full text |
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Summary: | The present invention relates to an optics device for inspecting a surface, comprising: a light source unit which emits inspection light to inspect a panel; an aspheric mirror which reflects the incident inspection light emitted from the light source unit via the panel to the panel side; an imaging lens unit which receives the inspection light passed through the panel after being reflected from the aspheric mirror; and an inspection unit which produces an inspection image of the panel using the inspection light penetrated the imaging lens unit.
본 발명은 패널을 검사하기 위한 검사광을 방출하는 광원부, 상기 광원부로부터 방출되어 패널을 거쳐 입사된 검사광을 패널 쪽으로 반사시키는 비구면거울, 상기 비구면거울에 반사된 후에 패널을 거친 검사광이 입사되는 이미징렌즈부, 및 상기 이미징렌즈부를 통과한 검사광을 이용하여 패널에 대한 검사영상을 생성하는 검사부를 포함하는 표면 검사 광학장치에 관한 것이다. |
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Bibliography: | Application Number: KR20140091345 |