OPTICS APPARATUS FOR INSPECTING SURFACE OF PANEL AND METHOD FOR INSPECTING SURFACE

The present invention relates to an optics device for inspecting a surface, comprising: a light source unit which emits inspection light to inspect a panel; an aspheric mirror which reflects the incident inspection light emitted from the light source unit via the panel to the panel side; an imaging...

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Bibliographic Details
Main Authors SEO, YONG MIN, OH, SANG MIN, CHO, HAE DONG, LEE, SU HYUN, SHIN, HYEON GAB
Format Patent
LanguageEnglish
Korean
Published 27.01.2016
Subjects
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
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Summary:The present invention relates to an optics device for inspecting a surface, comprising: a light source unit which emits inspection light to inspect a panel; an aspheric mirror which reflects the incident inspection light emitted from the light source unit via the panel to the panel side; an imaging lens unit which receives the inspection light passed through the panel after being reflected from the aspheric mirror; and an inspection unit which produces an inspection image of the panel using the inspection light penetrated the imaging lens unit. 본 발명은 패널을 검사하기 위한 검사광을 방출하는 광원부, 상기 광원부로부터 방출되어 패널을 거쳐 입사된 검사광을 패널 쪽으로 반사시키는 비구면거울, 상기 비구면거울에 반사된 후에 패널을 거친 검사광이 입사되는 이미징렌즈부, 및 상기 이미징렌즈부를 통과한 검사광을 이용하여 패널에 대한 검사영상을 생성하는 검사부를 포함하는 표면 검사 광학장치에 관한 것이다.
Bibliography:Application Number: KR20140091345