FINNED SHUTTER DISK FOR A SUBSTRATE PROCESS CHAMBER
Shutter disks for use in process chambers are provided herein. In some embodiments, a shutter disk for use in a process chamber may include a body having an outer perimeter, a top surface of the body, wherein the top surface includes a central portion having a substantially horizontal planar surface...
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Main Authors | , , , , |
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Format | Patent |
Language | English Korean |
Published |
22.09.2015
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Subjects | |
Online Access | Get full text |
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Summary: | Shutter disks for use in process chambers are provided herein. In some embodiments, a shutter disk for use in a process chamber may include a body having an outer perimeter, a top surface of the body, wherein the top surface includes a central portion having a substantially horizontal planar surface, and at least one angled structure disposed radially outward of the central portion, each of the at least one angled structure having a top portion and an angled surface disposed at a downward angle in a radially outward direction from the top portion toward the outer perimeter, and a bottom surface of the body. |
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Bibliography: | Application Number: KR20157021940 |