ROBOT FOR TRANSFEERING SUBSTRATE AND SUBSTRATE PROCESSING APPARATUS USING THE SAME
The present invention relates to a substrate processing apparatus including: a load lock chamber to allow a substrate transferred from the outside to be laid, wherein the inside is converted into a vacuum state or an atmospheric pressure state; a substrate processing module wherein a process for the...
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| Main Authors | , , , , , |
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| Format | Patent |
| Language | English Korean |
| Published |
21.08.2015
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| Subjects | |
| Online Access | Get full text |
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| Abstract | The present invention relates to a substrate processing apparatus including: a load lock chamber to allow a substrate transferred from the outside to be laid, wherein the inside is converted into a vacuum state or an atmospheric pressure state; a substrate processing module wherein a process for the substrate is carrier out; a transfer chamber placed between the load lock chamber and the substrate processing module and having an internal space to allow the substrate to be transferred; and a substrate transfer robot provided inside the transfer chamber to transfer the substrate. |
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| AbstractList | The present invention relates to a substrate processing apparatus including: a load lock chamber to allow a substrate transferred from the outside to be laid, wherein the inside is converted into a vacuum state or an atmospheric pressure state; a substrate processing module wherein a process for the substrate is carrier out; a transfer chamber placed between the load lock chamber and the substrate processing module and having an internal space to allow the substrate to be transferred; and a substrate transfer robot provided inside the transfer chamber to transfer the substrate. |
| Author | HYON, JUN JIN SHIN, YANG SIK KIM, CHANG DOL SONG, BYOUNG GYU KIM, YONG KI KIM, KYONG HUN |
| Author_xml | – fullname: KIM, YONG KI – fullname: SONG, BYOUNG GYU – fullname: HYON, JUN JIN – fullname: SHIN, YANG SIK – fullname: KIM, CHANG DOL – fullname: KIM, KYONG HUN |
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| Notes | Application Number: KR20140016469 |
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| RelatedCompanies | EUGENE TECHNOLOGY CO., LTD |
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| Snippet | The present invention relates to a substrate processing apparatus including: a load lock chamber to allow a substrate transferred from the outside to be laid,... |
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| SubjectTerms | BASIC ELECTRIC ELEMENTS CONVEYING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HANDLING THIN OR FILAMENTARY MATERIAL PACKING PERFORMING OPERATIONS PNEUMATIC TUBE CONVEYORS SEMICONDUCTOR DEVICES SHOP CONVEYOR SYSTEMS STORING TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING |
| Title | ROBOT FOR TRANSFEERING SUBSTRATE AND SUBSTRATE PROCESSING APPARATUS USING THE SAME |
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