ROBOT FOR TRANSFEERING SUBSTRATE AND SUBSTRATE PROCESSING APPARATUS USING THE SAME

The present invention relates to a substrate processing apparatus including: a load lock chamber to allow a substrate transferred from the outside to be laid, wherein the inside is converted into a vacuum state or an atmospheric pressure state; a substrate processing module wherein a process for the...

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Bibliographic Details
Main Authors KIM, YONG KI, SONG, BYOUNG GYU, HYON, JUN JIN, SHIN, YANG SIK, KIM, CHANG DOL, KIM, KYONG HUN
Format Patent
LanguageEnglish
Korean
Published 21.08.2015
Subjects
BASIC ELECTRIC ELEMENTS
CONVEYING
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
HANDLING THIN OR FILAMENTARY MATERIAL
PACKING
PERFORMING OPERATIONS
PNEUMATIC TUBE CONVEYORS
SEMICONDUCTOR DEVICES
SHOP CONVEYOR SYSTEMS
STORING
TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING
TRANSPORTING
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Summary:The present invention relates to a substrate processing apparatus including: a load lock chamber to allow a substrate transferred from the outside to be laid, wherein the inside is converted into a vacuum state or an atmospheric pressure state; a substrate processing module wherein a process for the substrate is carrier out; a transfer chamber placed between the load lock chamber and the substrate processing module and having an internal space to allow the substrate to be transferred; and a substrate transfer robot provided inside the transfer chamber to transfer the substrate.
Bibliography:Application Number: KR20140016469