DEPORATION APPARATUS

According to an embodiment of the present invention, a deposition apparatus includes: a main body part; an accepting part provided inside the main body part to accept raw materials; and a heating part provided outside the main body part to cover the main body part. The heating part includes two or m...

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Bibliographic Details
Main Authors HAN, SEUNG HEON, MOK, JIN IL, KIM, CHANG WOO, MOON, BONG SEOK
Format Patent
LanguageEnglish
Korean
Published 12.08.2015
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:According to an embodiment of the present invention, a deposition apparatus includes: a main body part; an accepting part provided inside the main body part to accept raw materials; and a heating part provided outside the main body part to cover the main body part. The heating part includes two or more sub heating parts.
Bibliography:Application Number: KR20140012074