GLASS SUBSTRATE CLEANING METHOD

• Main Authors: TAKENAKA ATSUYOSHI, SAHARA KOJI, ENOMOTO HISAO, ISHIKAWA CHIAKI, KIYAMA ATSUSHI, NAKAJIMA YOUJI, KOBAYASHI DAISUKE, MAEYANAGI YOSHITAKA, TAKAHASHI HIDEYUKI
• Format: Patent
• Language: English; Korean
• Published: 29.07.2015
• Subjects: ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES; CANDLES; CHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREOUSENAMELS; CHEMISTRY; DETERGENT COMPOSITIONS; DETERGENTS; DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING; FATTY ACIDS THEREFROM; FREQUENCY-CHANGING; GLASS; JOINING GLASS TO GLASS OR OTHER MATERIALS; METALLURGY; MINERAL OR SLAG WOOL; NON-LINEAR OPTICS; OPTICAL ANALOGUE/DIGITAL CONVERTERS; OPTICAL LOGIC ELEMENTS; OPTICS; PHYSICS; RECOVERY OF GLYCEROL; RESIN SOAPS; SOAP OR SOAP-MAKING; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS,MINERALS OR SLAGS; SURFACE TREATMENT OF GLASS; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF; USE OF SINGLE SUBSTANCES AS DETERGENTS

연마 후의 유리 기판의 세정 방법에 있어서, 세정된 유리 기판 표면에 형성되는 수지 BM 막의 밀착성 저하를 억제하여, 수지 BM 막의 박리를 방지한다. 산화세륨 입자를 함유하는 연마제에 의해 연마된 유리 기판을, 유기산을 함유하는 산성의 수계 세정액에 의해 세정하고, 이어서 염기를 함유하는 알칼리성의 수계 세정액에 의해 세정하는 것을 특징으로 하는 유리 기판의 세정 방법이다. A method for cleaning a glass substrate after polishing, wherein a decrease in adhesion performance of a resin BM film formed on the cleaned glass substrate surface is suppressed and peeling of the resin BM film is prevented. A glass substrate cleaning method, characterized in that a glass substrate polished using a polishing agent containing cerium oxide particles is washed using an acidic aqueous cleaning liquid containing an organic acid and then washed using an alkaline aqueous cleaning liquid containing a base.