COMPOSITE TRANSPARENT ELECTRODES

Provided are a composite transparent electrode, a manufacturing method thereof, and an electronic device comprising the same, wherein the composite transparent electrode comprises: a metal nitride thin film including at least one metal selected from indium (In), titanium (Ti), zinc (Zn), zirconium (...

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Bibliographic Details
Main Authors PARK, HYEON CHEOL, LEE, SANG MOCK, KWAK, CHAN, SON, YOON CHUL, KIM, KWANG HEE
Format Patent
LanguageEnglish
Korean
Published 10.07.2015
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Summary:Provided are a composite transparent electrode, a manufacturing method thereof, and an electronic device comprising the same, wherein the composite transparent electrode comprises: a metal nitride thin film including at least one metal selected from indium (In), titanium (Ti), zinc (Zn), zirconium (Zr), and gallium (Ga); and a metal oxide thin film including at least one metal selected from indium (In), zinc (Zn), tin (Sn), and titanium (Ti) stacked on the surface of one side or both sides of the nitride thin film. 인듐(In), 티타늄(Ti), 아연(Zn), 지르코늄(Zr), 및 갈륨(Ga)으로부터 선택된 1종 이상의 금속을 포함하는 금속 질화물 박막; 및 상기 질화물 박막의 한쪽 또는 양쪽 표면에 적층된 인듐(In), 아연(Zn), 주석(Sn), 및 티타늄(Ti)으로부터 선택된 1종 이상의 금속을 포함하는 금속 산화물 박막을 포함하는 복합체 투명 전극, 그 제조 방법 및 이를 포함한 전자 소자가 제공된다.
Bibliography:Application Number: KR20140000364