TARGET MATERIAL SUPPLY FOR AN EXTREME ULTRAVIOLET LIGHT SOURCE

• Main Authors: VASCHENKO GEORGIY O, BOWERING NORBERT R, BAUMGART PETER M, DE DEA SILVIA
• Format: Patent
• Language: English; Korean
• Published: 30.06.2015
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; X-RAY TECHNIQUE

극자외선(EUV) 광원용 타겟 재료 공급 장치는 제1 단부, 제2 단부, 및 제1 및 제2 단부 사이에 형성된 측벽을 갖춘 포함하는 튜브를 포함한다. 튜브의 외측면 중 적어도 일부분은 전기 절연성 재료를 포함하고, 제1 단부는 가압된 타겟 재료를 받아들이고, 제2 단부에는 가압된 타겟 재료가 통과하여 타겟 재료 방울의 스트림을 만들어내는 오리피스가 형성되어 있다. 타겟 재료 공급 장치는 또한 튜브의 외측면 상에 전기 도전성 코팅을 포함한다. 이 코팅은 튜브의 외측면을 접지에 전기적으로 접속시켜 외측면 상의 표면 전하를 줄이도록 구성되어 있다. A target material supply apparatus for an extreme ultraviolet (EUV) light source includes a tube that includes a first end, a second end, and a sidewall defined between the first and second ends. At least a portion of an outer surface of the tube includes an electrically insulating material, the first end receives a pressurized target material, and the second end defines an orifice through which the pressurized target material passes to produce a stream of target material droplets. The target material supply apparatus also includes an electrically conductive coating on the outer surface of the tube. The coating is configured to electrically connect the outer surface of the tube to ground to thereby reduce surface charge on the outer surface.