SEMICONDUCTOR MEMORY DEVICE AND METHOD OF FABRICATING THE SAME
The present invention relates to a three-dimensional semiconductor memory device and a method of fabricating the same. The method of fabricating the three-dimensional semiconductor memory device comprises the steps of: forming a thin film structure by stacking sacrificial films and insulating films...
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Main Authors | , , , |
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Format | Patent |
Language | English Korean |
Published |
25.06.2015
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Subjects | |
Online Access | Get full text |
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