SEMICONDUCTOR MEMORY DEVICE AND METHOD OF FABRICATING THE SAME

The present invention relates to a three-dimensional semiconductor memory device and a method of fabricating the same. The method of fabricating the three-dimensional semiconductor memory device comprises the steps of: forming a thin film structure by stacking sacrificial films and insulating films...

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Bibliographic Details
Main Authors LIM, HUN HYEONG, YANG, HAN VIT, AHN, JAE YOUNG, KIM, JUNG HWAN
Format Patent
LanguageEnglish
Korean
Published 25.06.2015
Subjects
ELECTRICITY
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