HIGHLY SENSITIVE SENSOR COMPRISING CRACKED CONDUCTIVE THIN FILM AND PROCESS FOR PREPARING SAME

• Main Authors: LEE, CHAN SEOK, KANG, DAE SHIK, CHOI, MAN SOO, SUH, KAHP YANG, CHOI, YONG WHAN, KIM, TAE IL
• Format: Patent
• Language: English; Korean
• Published: 11.06.2015
• Subjects: ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVEREDIN A SINGLE OTHER SUBCLASS; MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC ORINFRASONIC WAVES; MEASURING; MEASURING ANGLES; MEASURING AREAS; MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS; MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS; MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR; PHYSICS; TARIFF METERING APPARATUS; TESTING

Provided is a highly sensitive sensor with a crack comprising a support and a conductive thin film. The highly sensitive sensor forms micro-cracks on the conduction on the support. In a micro-attachment structure to form the micro-cracks, an external stimulus is converted into an electrical signal by a change in resistance value caused by the electrical change, short, or opening of the micro-cracks. The highly sensitive sensor is usefully used in a displacement sensor, a pressure sensor, a vibration sensor, an artificial skin, and a voice recognition system. 크랙 함유 고감도 센서가 제공된다. 상기 고감도 센서는 지지체 상에 형성된 전도성 박막에 미세 크랙을 형성하여 얻어지며, 상기 미세 크랙이 형성하는 미세 접합구조에서 이들이 전기적으로 변화, 단락 또는 개방됨에 따라 저항값의 변화가 발생하여 외부 자극을 전기적 신호로 변환하게 된다. 이와 같은 고감도 센서는 변위센서, 압력센서, 진동센서, 인공 피부, 음성인식 시스템 등에 유용하게 사용할 수 있다.