EVAPORATION APPARATUS AND METHOD OF FORMING A THIN FILM USING THE SAME
Disclosed is an evaporation apparatus and a method of forming a thin film using an evaporation apparatus. The evaporation apparatus may comprise: a chuck, a source film, a heating member, and a mask. The chuck supports a substrate, and may be moved along a first direction which is parallel to a top...
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Main Authors | , , , , |
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Format | Patent |
Language | English Korean |
Published |
13.05.2015
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Subjects | |
Online Access | Get full text |
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