APPARATUS FOR DEPOSITING AN ORGANIC LAYER

An apparatus for depositing an organic layer includes a tank, an auger, a main heater and a shower head. The tank stores organic materials. The auger is inclined upwards in the tank and rotates and transfers the organic materials. The main heater vaporizes the organic materials transferred by the au...

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Bibliographic Details
Main Authors KANG, TAE WOOK, LEE, WON BAEK, VALERIY PRUSHINSKIY, KIM, MIN SOO, LEE, YOU JONG, LEN KAPLAN, NA, HEUNG YEOL
Format Patent
LanguageEnglish
Korean
Published 18.03.2015
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC HEATING
ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:An apparatus for depositing an organic layer includes a tank, an auger, a main heater and a shower head. The tank stores organic materials. The auger is inclined upwards in the tank and rotates and transfers the organic materials. The main heater vaporizes the organic materials transferred by the auger. The shower head injects the organic material vaporized by the main heater to the substrate. Therefore, because the auger is inclined upwards, vaporized organic materials don′t flow backward to the tank. Consequently, the cogging of the injection hole of the tank due to the organic materials can be prevented.
Bibliography:Application Number: KR20130108226