METHOD OF CRYSTALLIZING A PATTERN AND APPARATUS FOR PERFORMING THE SAME
In the present invention, provided is a method for crystallizing patterns to improve test accuracy while significantly reducing time of plasticizing and testing patterns, comprising a step of turning light emitted from light source into surface light and emitting the surface light to the pattern on...
Saved in:
Main Author | |
---|---|
Format | Patent |
Language | English Korean |
Published |
06.03.2015
|
Subjects | |
Online Access | Get full text |
Cover
Loading…
Be the first to leave a comment!